LPKF MOSYS
Technical data:
| Absolute accuracy X and Z2: | < +/-2 µm |
| Absolute accuracy Y and Z1: | < +/-3 µm |
| Absolute accuracy φ: | < +/- 5" |
MotionSystems
PDF (466 KB)





| Absolute accuracy X and Z2: | < +/-2 µm |
| Absolute accuracy Y and Z1: | < +/-3 µm |
| Absolute accuracy φ: | < +/- 5" |
MotionSystems
PDF (466 KB)