LPKF Z-φ 2/20
Range of motion 20 mm, +/- 10°
The LPKF Z-φ 2/20 lifting and rotating unit has been specially developed for the extremely fast and precise positioning of wafers in chip industry facilities. Its very small, light and compact design also makes it suitable for mounting on LPKF cross tables. In combination with the 3D corrective algorithm developed by LPKF, Z-errors of the overall system can be corrected. LPKF can also offer vacuum chucks as an option. The LPKF Z-φ 2/190 lifting rotary unit can be used for larger turning ranges (+/- 95°).
z-φ 2/190
PDF (143 KB)
