Cross Table with linear motors and air bearings
General description
The LPKF XY 35/35 GL is a positioning table with air bearings which has been specifically designed to meet the exacting requirements of metrology and laser structuring. The combination of fast linear motors and a high-resolution measuring system in this x-y stage guarantees processing and measuring of structures from the macro- to the micro-range and allows a specific position to be reached with precision and, in addition, the movement pathways follow predetermined paths with micrometer accuracy.Granite stands for long-term stability of the highly accurate guide surfaces, excellent oscillation damping, stabilising mass for high-acceleration actuators and permanent guidance accuracy in the range of angular seconds.
Aerostatic guidance stands for the lowest pitch, yaw and roll errors, extremely high resolution through the almost total lack of friction, freedom from vibration and oscillation, the highest guidance accuracy through the integration of surface errors, particularly in the Z-direction, no wear and zero maintenance.
Brushless DC linear induction motor stands for outstanding path accuracy and synchronous tracking, high acceleration capacity through direct power transmission, no wear or maintenance because there is no mechanical contact.
Open incremental linear scale no wear or maintenance because there is no mechanical contact, the accuracy can be increased by error compensation. (LPKF XY 40/35 GS)
Application
The LPKF XY 35/35 GL is used wherever very high demands are placed upon path accuracy and productivity. This includes applications such as:
• Structuring flat objects, e.g. laser cutting and engraving,
micro-material machining and many more tasks
• Sensitive assembly platform and handling system
• Positioning device for quality control, e.g. with optical inspection
system
• High-precision three-dimensional measuring e.g., surface scanning
Options
LPKF implements the following customer-specific options:
• Increased accuracy of the linear measuring systems
• Increased accuracy in both axes through error compensation after
laser calibration
• Increased guidance accuracy through tolerance specification of the
granite guide surfaces
• Safety measures around the system
• Increased resolution
Technical data
| Range of travel: | 350 x 350 mm |
| Measuring system accuracy: | bei 20 ± 0,5°C ± 3 µm |
| Yaw and pitch angles: | < 5 sek |
| Max. accuracy: | 2 + L/200 µm |
| Max. speed: | 300 mm/s |
| Max. acceleration: | ca. 0,2 g |
| Repetition accuracy: | < 1 µm |
| Compressed-air supply: | 6 bar |
| Air consumption: | ca. 1000 l/h |
| Additional weight: | ca. 50 kg |
| *:Total weight: | ca. 700 kg |
| *:Space requirement LxWxH: | 1250 x 1130 x 310 mm |
*Installed dimensions and weight without stand
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