General description

The LPKF XY 25/25 GL Cross Table is a precision positioning system with a monolithic granite sub-structure. Each of the two axes is driven by a linear motor, equipped with two precision guides, and has a high resolution linear scale with an exact reference point. The combination of a linear motor and precision guides enables highly-dynamic solutions to be implemented in a very compact design for the mid-sized traversing range.

Application

The LPKF XY 25/25 GL has been specially developed for use in the chip industry. It positions wafers or other flat structures very quickly and extremely precisely under the measuring instruments used. This includes applications such as:
• Wafer bumpers
• Wafer samples
• Optical wafer inspection systems
• Precise 3D wafer measuring systems

Options

LPKF implements the following customer-specific options:
• Upgrading with a compact rotary lifting unit
  (for more info. see also LPKF Z-φ 2/20 and LPKF  Z-φ 2/190)
• Control with the LPKF MotionSystem®
  (e.g. synchronous operation of up to 6 axes)
• Increased accuracy through more precise position measuring
  systems
• CAA field correction
• 3D corrective algorithm
• Integration into user-specific machine concepts
• Accessories and protective devices
• Testing protocol

Technical data

Range of motion:	250 x 250 mm
Absolute accuracy:	< 2 μm
Max. velocity:	300 mm/s
Acceleration:	1 m/s2