Precision cross table with high stiffness in Z-direction and direct 2-dimensional linear motors and measuring system

General description

The precision cross table LPKF XY 10/10 GLAP was especially designed for precise positioning of parts that have to be mechanical processed. Another wide field of application is the using as a measuring table. An optional granite portal can be used for integration of a Z-axis, a milling spindle or, if necessary, sensors. In combination with the developed by LPKF 3D correction software
it is possible to compensate failures in Z-direction. For more dynamic applications can be used the HighSpeed-Cross Table LPKF HS4-G and HS 4-GP.

Mechanical design

The precision cross table LPKF XY 10/10 GLAP is build up on a very massive granite plate.A compact carriage, air-guided in one plane, is directly driven in 2-dimensions by moving coils. These motors are balanced, that is, the drive units do not have any effect on the guidance accuracy
because of the lack of magnetic attractive forces between moving and non-moving parts. A cross grid scale is integrated into the carriage, which scans both the accuracy in the axes in 2-dimensions as well as determining the position of the axes in relation to one another. The drive,
the measuring system and the carriage with the object carrier form a rigid unit and they are guided together on pre-stressed, aerostatic air bearings.

Options

• Portal for additional units
• Z-Axes with various ranges of travel and accuracies
• Optical measuring systems

Technical data

Range of motion:	100 x 100 mm²
Resolution (smallest Step):	20 nm
Repetition accuracy:	± 0,1 µm
Positioning accuracy:	± 0,5 µm (bei 20° C ± 0,5° K)
Max. velocity:	100 mm/s
Max. Drive force (XY):	30 N
Additional weight:	5 kg
Z-Stiffness of the table:	100 N/µm

XY 10-10 GLAP
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