Cross table with air-bearings and with direct 2-dimensional linear motors and measuring system

Technical data:

Range of motion:	100x100 mm
Absolute accuracy:	< 2 μm
Max. velocity:	300 mm/s
Usable acceleration:	2g

Advantages:

Compact, air-guided in the plane and 2-dimensional carriages directly driven by moving coils with integrated cross grid scale that is scanned in two dimensions, which determines not only the accuracy in the axes but also the relative position of the axes to each other. The drive is absolutely backlash-free and requires no maintenance. The accuracy has long-term stability and to a great extent independent of temperature. The lightweight construction enables the highest dynamic response and thus precise paths at high speeds.

LPKF HS G-GP
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